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无尘烤箱

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高洁净度烘箱;

Product Description: High cleanliness oven;

提供不同尺寸内腔,双腔/四腔/六腔类型设备;

Provide different sizes of cavity, double cavity / four cavity / six cavity type equipment;

根据客户工艺需求,可选带HEPA配置,与无HEPA配置;

According to the process requirements of customers, it can be configured with or without HEPA;

支持SECS/GEM自动联机需求;

Support SECS/GEM automatic online requirements;

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无尘等级:Class 100;

Parameters: Dust free grade: Class 100;

含氧量: 选配;

Oxygen content: optional;

温度范围: +60~ +300°C;

Temperature range:+ 60 ° C ~ + 300 ° C;

温度均匀度:±1.5% (空载) ;

Temperature uniformity: ± 1.5% (no load);

升温速度:常温~+300°C,升温速率 > 6°C/min;

Heating rate: room temperature ~ + 300 ° C, heating rate > 6 ° C / min;

降温速度:夹层降温装置,降温斜率可设定;

Cooling rate: sandwich cooling device, cooling slope can be set;

温度过冲:<2℃@200℃;

Temperature overshoot: < 2 ℃ @ 200 ℃;

温控精度:±1°C (空载);

Temperature control accuracy: ± 1 ° C (no load);

烘箱搁板为活动式,共两片, 搁板承重≥20kg;

The drying oven shelf is movable, with two pieces in total, and the shelf load is more than or equal to 20kg;

加热功率: 6KW (单腔);

Heating power: 6kW (single chamber);

地址:上海市浦东新区张杨路2389弄3号楼普洛斯大厦768室      电话:+86 13761002245      邮箱: xiwang@amsemi.com

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